 Rotary Union for CMP
Our one of products is Rotary Union for CMP. Specifications for Rotary Union.
1. No. of hole : 3 (contained 1~3 hole line media is slurry, NH4OH, NaOH, KOH, H2O2, Oxidant, etc...)
2. RPM : max. 200 ~ 500
3. Pressure : max. 8 bar
4. Vacuum : 10^3 ~ 10^-6 torr
5. Temperature : ~ 200 degree Celsius
6. Chemicals : alkali, acid, oxidant, silica, air, chemical gas, acid gas, etc...
7. Size : more smaller size or better
8. Running condition : Dry running without lubricant
9. Life time : depend on operating time, about min. 2~10 years * Certification Self test by leakage tester apparatus : continue change to change(pressure to vacuum to pressure to vacuum)
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