 UHV Rotary Feedthrouh Recoprocating Sealing Unit
 1. Ultra High Vacuum(UHV)Type Rotary Union :This is a combined sealing unit, which supplies various different reactive gases through each ports and also, seals rotating shaft between atmosphere side and vacuum chamber, when deposition wafer under High Vacuum states of LCD or Semiconductor processing lines. Applications are CVD, ALD, PE-CVD, Special Vacuum Rotary Equipments.
2.High Pressure and UHV Sealing Unit For Rotary and Reciprocating : This is a sealing unit, which seals a shaft is rotating and reciprocating at the same time of chamber of high pressure or high vacuum states of LCD or Semiconductor processing lines. Applications are Vacuum Robot, ALD, CVD, Auto Clave, Special Vacuum & High Pressure Equipments.
3. Specifications (1) Degree of Vacuum : < 10^-7 Pa (10-9 Torr) (2) Leakage rate (He) : < 10^-10 Pa . m^3/sec (3) Port Number : 1 ~ 15 EA (4) Temperature range : - 80 ~ 300 degree C (5) Velocity : < 5 m/sec (6) Media : Chemical & Reactive Gas.... For question, Please send me any messages: hjrhee@sealia.com, Tel. +82-2-866-8737 Fax. +82-2-866-8757
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