 Rotary Feedthrough in High Vacuum & High Temp.
∙ Characteristics of Shin Won Sealing System
Our Hermetic Sealing System provides high quality, high reliability, theoretical and technical service, good delivery, more valuable price. Especially, All of products are operated in dry running condition without lubricants. and also reciprocating sealing system don't use metallic bellows, it has save space and economic effects.
Shin Won Feedthroughs are different from magnetic fluid sealing system and mechanical face sealing system.
∙ Products :
- For vacuum Sealing Units
Rotary Feedthrough, Reciprocating Feedthrough
Multi-port Rotary Union, Rotary & Reciprocating Feedthrough
- For Pressure Sealing Units
Rotary Feedthrough, Reciprocating Feedthroug,
Multi-port Rotary Union, Rotary & Reciprocating Feedthrough
- For Vacuum and pressure Sealing Units
Rotary Feedthrough, Reciprocating Feedthrough
Multi-port Rotary Union, Rotary & Reciprocating Feedthrough
∙ Operating Conditions :
․ Motion : Rotary, Reciprocating, Rotary at the same time Reciprocating,
Multiple Rotary, Rotary and Reciprocating system, Co-axial, Muti-axial.
․ Media : Reactive gas, Inert gas, Water, other liquids, etc.
․ Temperature Range : -20℃ ~ + 150℃ without cooling system.
․ Leakage rate : in vacuum, < 7.5 X 10^-8 Pa․m3/s by Helium gas.
in pressure, < 6.9 X 10^-3 bar/min, 0.1 psi/min by Nitrogen gas.
․ Pressure : in vacuum, < 10^-8 torr. in pressure, < 15 bar.
․ Speed : Max. 10 m/s.
․ Shaft diameter : 6 ~ 1800 mm
․ Torque : depend on type, we can service to customer.
∙ Applications :
- Semiconductor Devices ; CVD, MOCVD, LPCVD, PECVD, PCD, ALD, CMP, OLED, LCD Devices, FPD Devices, Wafer Rotation Handing devices, Vacuum deposition System, Ion Implantor, Etcher, Asher, Edge Grinder, Scrubber, RTP, Sputter, Lamp Devices, Autoclave, Wafer Robot, Etc.
- Petrochemical Plants, Pharmacy and Medical Line : Agitator, Reactor, Chemical Pump, Centrifugal, Mixer, Etc.
Tel.+82-2-866-8737. Fax.+82-2-866-8757. E-mail : hjrhee@sealia.com
|
Rotary_Feedthrough_1.JPG
