 Rotary Union for CMP, CVD
당사는 반도체 장비 CMP, CVD, ALD, LCD와 관련된 Sealing System : Rotary Union, Lipseal Unit, Eriseal unit 등을 자체 연구 개발하여 제조 판매하고 있으며, 현재 200mm, 300mm용으로 양산되고 있습니다.
- 관련기술 및 제품과 관련하여 궁금한 점이 있으면 문의를 바랍니다.
For semiconductor fields, we have many customer in Korea. We supply to semiconductor device manufacturer and end user.
Especially, semiconductor device "CMP, CVD, ALD, LCD" , already our rotary union using in now Korea Semiconductor manufacturers...
Our products are don't make based on mechanical seal system. This is face contact sealing system. we can make linear contact sealing system.
Specifications for Rotary Union.
1. No. of hole : 4 ~ 10
(contained 1~4 hole line media is slurry, NH4OH, NaOH, KOH, H2O2, Oxidant, etc...)
2. RPM : max. 200 ~ 500
3. Pressure : max. 8 bar
4. Vacuum : 10^3 ~ 10^-6 torr
5. Temperature : ~ 200 degree Celsius
6. Chemicals : alkali, acid, oxidant, silica, air, chemical gas, acid gas, etc...
7. Size : more smaller size or better
8. Running condition : Dry running without lubricant
9. Life time : depend on operating time, about min. 2~10 years
* Certification
Self test by leakage tester apparatus : continue change to change(pressure to vacuum to pressure to vacuum)
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